Products | Introduction Video of Handling (Through-beam mapping operation) To prevent the wafer breakage by detecting a cross-slotted wafer or double wafer in cassette JEL is the leading manufacturer of clean robots for handling wafers or FPD substrates This page lists the video of through-beam mapping operation
Product - WaferPath Teaching has been enhanced and is easier and faster Wafer scanning is faster and accomplished in a single pass, characterizing the top edge, bottom edge and thickness of the found wafers Cross-slotted and double-slotted wafers are detected
EVTMHS Extended Vertical Travel Robot System - Genmark Automation The optional through beam mapping sensor allows for reliable detection of normally inserted, cross-slotted, or double-slotted wafers in FOUPs and boats Depending on the chosen arm configuration the system can access one or two in-line Semi standard FOUPs
SMIF Load Port Transfer (LPT) | Solutions - Brooks In both load ports, a sophisticated feature set includes laser-based cassette slot wafer mapping, cross-slotted detection, wafer protrusion sensing, and automatic wafer reseating Open cassette I O processing is available with a Manual Open Cassette Adapter (MOCA) option
High Performance Wafer Handling Products - SPS-international valuable wafers The end-effector features an integrated mapping sensor which scans each 300mm carrier to determine wafer location and any wafer positioning errors, including cross-slotted and double stacked wafers WS300M 300mm Single Wafer Sorter atures an industry standard 300mm
对射型-晶圆扫描 及位置传感器 - Quartet Mechanics * Accurately detects empty slots and cross slotted or double slotted wafers 准确检测空槽、交叉槽或双槽中的晶圆 * Requires minimal wafer engagement < 3mm from wafer edge 最小晶圆占用范围（从晶圆边缘起< 3mm) * Class one laser 等级1 激光 * Immune to ambient light 不受环境光影响
Wafer mapping system - Asyst Technologies, Inc. - FreePatentsOnline. com As such, a double slotted wafer condition will be indicated where the beam is blocked for twice as long as expected Additionally, a cross slotted condition will be indicated as a result of the beam being blocked for a period of time longer than for double slotted wafers
SMIF Load Ports for Wafers - Werner-Lieb Compatible with RSP200 SMIF wafer pods; Available with bolts interface or as table top version; Wafer mapping via light barrier; Detection of wafers in the positions correctly inserted; cross slotted; double slotted; 4 status LEDs; SEMI E19 4-0417; Cleanliness ISO class 3; Made in Germany